Multilayered thin-film structures containing multiple ternary and quaternary compounds (also known as heterostructure) are required for most semiconductor devices. Ideally, the entire thin-film structure should be grown on a substrate with the same lattice constant (referred to as lattice-matched substrate).
The binary compounds (such as GaAs, GaSb, InP, GaP, InAs, and InSb) with a few discrete lattice constants are commercially available. For fabrication of bulk crystals of binary compounds such as GaAs and InP, many procedures such as Bridgman crystal growth, vertical Gradient freezing (VGF), and Liquid encapsulation Czochralski (LEC) are used.